Sorin Cosoveanu sent me some data from the document División Político Administrativa y Censal 2007  (long download), on the website of the Instituto Nacional de Estadísticas (INE: National Statistics Institute). That document is the source for the INE codes and areas of provinces in the table below.

Paraskevas Renesis reports that, in a constitutional reform, a Chilean law was published on 2007-07-30 authorizing a status of territorio especial (special territory) for Easter Island (Isla de Pascua) and the Archipiélago Juan Fernández. When the law is implemented, according to La Nación , Easter Island will be administered directly through the Ministry of the Interior, while the other islands will continue to be part of Valparaíso region.

Change history:

1. ~1991: Chile reorganized from 40 provincias (provinces), which were further subdivided into 334 comunas (municipalities), into 51 provinces. Before this change, the provinces in each region were as listed here:
1. Antofagasta: Antofagasta, El Loa, Tocopilla
2. Araucanía: Cautín, Malleco
3. Atacama: Chañaral, Copiapó, Huasco
4. Aisén: Aisén, Capitán Prat, General Carrera
5. Bío-Bío: Arauco, Bío-Bío, Concepción, Ñuble
6. Coquimbo: Choapa, Elqui, Limarí
7. Libertador: Cachapoal, Colchagua
8. Los Lagos: Chiloé, Llanquihue, Osorno, Valdivia
9. Magallanes: Magallanes, Tierra del Fuego, Ultima Esperanza
10. Maule: Curicó, Linares, Talca
11. Santiago: Santiago
12. Tarapacá: Arica, Iquique
13. Valparaíso: Isla de Pascua, Los Andes, Petorca, Quillota, San Antonio, San Felipe, Valparaíso
2. 2007-10-02: Los Ríos region formed by taking Valdivia province from Los Lagos. Ranco province formed by taking Futrono, La Unión, Lago Ranco, and Río Bueno municipalities from Valdivia province (former HASC code CL.LL.VV).
3. 2007-10-08: Arica and Parinacota region formed by taking Arica and Parinacota provinces from Tarapacá. Tamarugal province formed by taking Camiña, Colchane, Huara, Pica, and Pozo Almonte municipalities from Iquique province (former HASC code CL.TA.IQ).